ASML Denies US Claims of EUV Shipments to China

ASML rejects US government allegations of shipping EUV lithography systems to China, citing strict monitoring of its global fleet.

ASML has denied US government accusations that it delivered an EUV system or components to China. The company maintains it complies with export guidelines regarding US national security and asserts that none of its EUV systems are located in China. According to ASML, there are 314 EUV systems in use worldwide and 26 decommissioned. The company monitors every system constantly for interruptions, abnormal behavior, or loss of connection, ensuring customers cannot transport or modify hardware without authorization. ASML emphasizes that its oversight makes unauthorized shipments impossible. The US government has not yet responded to media inquiries regarding evidence for its accusations against the manufacturer.


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