China's Yuliangsheng to Scale DUV Machine Output

Shanghai Yuliangsheng Technology targets 25 DUV units by 2027 as CXMT expands DRAM capacity following a successful 2026 public offering.

Shanghai Yuliangsheng Technology has entered the DUV lithography market, planning to produce five 28nm immersion machines in 2026 and 20 units in 2027. These 193nm wavelength systems utilize mostly domestic parts, though some critical components are imported from Japan. Early deliveries are slated for SMIC, Hua Hong, and CXMT. This domestic shift follows the US MATCH Act, which restricts Chinese access to Western DUV technology. Simultaneously, CXMT went public on July 27, 2026, seeing its stock price surge nearly 500 percent. CXMT is currently mass producing 1a DRAM on its G5 node and developing vertical 3D DRAM. To support growth, CXMT is building new fabs in Shanghai and Hefei to reach a 600,000 wafer-per-month capacity, up from its current 200,000 and projected 300,000 by year-end 2026.